Thursday, April 27, 2017

350 mm Aluminum Nitride Heater for Semiconductor Industry

350 mm Aluminum Nitride Heater for Semiconductor Industry

Excellent heat conductivity

Anti-plasma erosion

CVD: Heater,ESC,Ring, Dome,Dummy Wafer

PVD: Heater,ESC,Dummy Wafer

Etching:ESC,Shower base,Chamber

www.chuck-table.com

1 comment:

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